BDS Series Pressure Sensor
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Features
- Dual Sensing Elements (Absolute & Differential)
- Top constraint absolute sensing element for helium applications
- Parylene coating available upon request
- RoHS Compliant
Applications
General Description
The BDS Basic Pressure Sensor was designed with the idea of combining two sensing elements into one package. This sensor is
designed to provide a precise fl ow measurement by combining a differential and absolute sensing element in the same package.
By combining the differential and absolute sensing element, engineers can save cost and space in today’s smaller devices.
The BASIC series pressure sensors are based upon a proprietary technology to reduce the size of the sensor and yet maintain a
high level of performance. Output offset errors due to position sensitivity; packaging stress and long term drift are all signifi cantly
reduced when compared to conventional silicon sensors. In addition, the sensor utilizes a silicon, micromachined, stress concen-
tration enhanced structure to provide a very linear output to measured pressure.
This series is intended for use with non-corrosive, non-ionic working fl uids such as air, dry gases and the like.
The output of the device is ratiometric to the supply voltage.
Pressure Sensor Characteristics Maximum Ratings
- Supply Voltage Vs: 6 Vdc
- Common-mode pressure: -10 to 10 psig
- Lead Temperature: 270°C
Environmental Specifications
Temperature Ranges
- Compensated: 0 to 50(70)°C
- Operating: -25 to 85°C
- Storage: -40 to 125°C
- Humidity Limits: 0 to 95% RH (non-condensing)
Standard Pressure Ranges
| Device Type |
Operating Pressure |
Nominal |
Std Dev. |
Units |
Proof Pressure |
Burst Pressure |
BDS-L10D030A
|
-- |
-- |
-- |
-- |
-- |
-- |
|
0 - 30 PSIA |
7.5 |
1.25 |
mV/PSI |
90 PSI |
150 PSI |
Differential |
0 - 10 inH2O |
3.0 |
0.40 |
mV/inH20 |
15 PSI |
150 PSI |
| BDS-L10D100A |
-- |
-- |
-- |
-- |
-- |
-- |
Absolute |
0 - 100 PSIA |
3.0 |
0.28 |
mV/PSI |
150 PSI |
150 PSI |
Differential |
0 - 10 inH2O |
3.0 |
0.40 |
mV/inH20 |
15 PSI |
30 PSI |
Performance Characteristics: BDS-L10D030A
| Parameter, note 1 |
Minimum |
Nominal |
Maximum |
Units |
| Offset Voltage (@1 atm) |
+25 |
-- |
+125 |
mv |
| Temperature Effect on Offset |
-- |
±3 |
-- |
uV/V/°C |
| Temperature Effect on Resistance |
1700 |
2600 |
3100 |
ppm/°C |
| Temperature Effect on Span |
-1500 |
-1900 |
-2400 |
ppm/°C |
| Linearity error |
-- |
±0.2 |
±0.5 |
%FSS |
| Hysteresis error |
-- |
±0.01 |
-- |
%FSS |
| Input Resistance |
2.0 |
2.5 |
3.0 |
kohms |
| Output Resistence |
2.0 |
2.5 |
3.0 |
kohms |
| Long term stability |
-- |
0.1 |
-- |
%FSS |
Differential Element
| Parameter, note 1 |
Minimum |
Nominal |
Maximum |
Units |
| Offset Voltage |
-- |
±5.0 |
±25.0 |
mv |
| Temperature Effect on Offset |
-- |
±3.0 |
-- |
uV/V/°C |
| Temperature Effect on Resistance |
2300 |
2600 |
3300 |
ppm/°C |
| Temperature Effect on Span |
-1700 |
-2200 |
-2700 |
ppm/°C |
| Linearity error |
-- |
±0.5 |
1.0 |
%FSS |
| Hysteresis error |
-- |
±0.01 |
-- |
%FSS |
| Position Sensitivity |
-- |
±0.01 |
±0.03 |
%FSS |
| Warm Up Shift |
-- |
±10.0 |
-- |
uV |
| Long term stability |
-- |
0.1 |
-- |
%FSS |
Performance Characteristics: BDS-L10D100A
| Parameter, note 1 |
Minimum |
Nominal |
Maximum |
Units |
| Offset Voltage (@1 atm) |
-20.0 |
-- |
+120 |
mv |
| Temperature Effect on Offset |
-- |
±3.0 |
-- |
uV/V/°C |
| Temperature Effect on Resistance |
1200 |
2600 |
3100 |
ppm/°C |
| Temperature Effect on Span |
-1500 |
-1900 |
-2400 |
ppm/°C |
| Linearity error |
-- |
±0.2 |
±0.5 |
%FSS |
| Hysteresis error |
-- |
±0.01 |
-- |
%FSS |
| Input Resistance |
2.0 |
2.5 |
3.0 |
kohms |
| Output Resistence |
2.0 |
2.5 |
3.0 |
kohms |
| Long term stability |
-- |
0.1 |
-- |
%FSS |
Differential Element
| Parameter, note 1 |
Minimum |
Nominal |
Maximum |
Units |
| Offset Voltage |
-- |
±5.0 |
±25.0 |
mv |
| Temperature Effect on Offset |
-- |
±3.0 |
-- |
uV/V/°C |
| Temperature Effect on Resistance |
2300 |
2600 |
3300 |
ppm/°C |
| Temperature Effect on Span |
-1700 |
-2200 |
-2700 |
ppm/°C |
| Linearity error |
-- |
±0.5 |
1.0 |
%FSS |
| Hysteresis error |
-- |
±0.01 |
-- |
%FSS |
| Position Sensitivity |
-- |
±0.01 |
±0.03 |
%FSS |
| Warm Up Shift |
-- |
±10.0 |
-- |
uV |
| Long term stability |
-- |
0.1 |
-- |
%FSS |
Specification Notes
(1): All parameters are measured at 5.0 volt excitiation, for the nominal full scale pressure and room temperature unless otherwise specified. Pressure measurements are with positive pressure applied to port B.
(2): Shift is relative to 25°C.
(3): Shift is within the first hour of excitation applied to the device.
(4) Measured at one-half full scale rated pressure using best straight line curve fit.
(5): The voltage added to the offset voltage at full scale pressure. Nominally the output voltage range is 0.25 to 4.25 volts for minus to plus full scale pressure.
Pressure Response: for any pressure applied the response time to get to 90% of pressure applied is typically less than 500 useconds.
All Sensors reserves the right to make changes to any products herein. All Sensors does not assume any liability arising out of the application or use of any product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others.
Download datasheet (PDF)
Download dimensional drawing (PDF)
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